Plasma Etch Technological Advantages

Nitrogen Purging

GENERAL
The purpose of nitrogen purging is to prevent contamination of the vacuum pump oil. Without nitrogen purging, the vacuum pump oil will quickly contaminate with hydrofluoric acid (HF), when using CF4 as a process gas. This acid will attack the vacuum pump and severely limit its service life.

DESCRIPTION
• Nitrogen purging is automatic and functional any time the vacuum pump is operational.
• The purging operation is transparent to the operator and has no impact on normal processing.

ADVANTAGE
The reliability and service life of the vacuum pump are extended.

More About Plasma Etch

Plasma Etch Quick Fact

When Plasma Etch, Inc. began designing plasma etching systems in the early 1980s, we recognized that, for many applications, plasma technology could be a cost effective solution to difficult processing problems. It was clear, however, that plasma technology posed several challenges.

To meet those challenges, Plasma Etch took an applications oriented approach to system design, and sought to provide new and innovative solutions to our customers.

Plasma Systems			Contact Us Today	Plasma Etch Inc.
PE-50 PE-50XL PE-100 PE-200	BT-1 TT-1 MK-II MK-III	PE-1000 PE-2000R Large Batch Tumbler Custom Machines		3522 Arrowhead Drive Carson City, NV 89706 Tel: 775-883-1336 Fax: 775-883-2559 Email: sales@plasmaetch.com