sales@plasmaetch.com
PE-50 XL | Benchtop Plasma Cleaner
Small Design Larger Chamber Size
The Plasma Etch, Inc. PE-50 XL has all the features as the PE-50, however it comes with a 8” w x 9” d x 4” h chamber for those looking to process larger applications. This plasma cleaner is made for smaller production facilities, research and development labs, testing facilities and universities.
Domestic Price: Please Contact For Pricing
Call us at 775-883-1336 or email us at sales@plasmaetch.com for more information.
Overview
This system is made for smaller production facilities, R&D facilities and universities. The system features an implosion proof 8” w x 9” d x 4” h Rectangular welded Aluminum Vacuum Chamber and a direct powered RF electrode. Applications include medical devices, solar cells, printed circuit boards, connectors, MEMs, nanotechnology, wafer level packaging as well as many other related semiconductor processes.
Features
As in all Plasma Etch systems a capacitive parallel plate design is used for the most effective plasma generation.
Competitive units with glass/quartz barrel chambers cannot penetrate the vacuum containment vessel and therefore are restricted to inductive coupling using an RF coil wrapped around the exterior of the chamber.
This is an inefficient method resulting in loss of power input and considerably lower etch/clean removal rates.
The PE-50 is comprised of components made in the USA and is built in and supported from our Carson City, NV headquarters with the best customer service available in the industry.
Specifications
Standard System Features
Welded Aluminum Vacuum Chamber, 8” X 9” X 4”
Single 7” x 8” horizontal Electrode
150 Watts @ 50 kHz R.F. Generator
Precision Needle Valve Flow Control 0-25 CC/Min
Pirani Vacuum Gauge 0-1 Torr
5 CFM Oxygen Service Vacuum Pump
Single Process Sequence
Optional System Features
100W @ 13.56MHz RF Generator and automatic Matching network
Light Bar
Mass Flow Controllers
System Electrical & Mechanical
AC Service, 120VAC 60 Hz @ 15 A or 220 VAC 50 Hz @ 14A
Console Shipping Weight 55lbs
Vacuum pump shipping weight 35lbs
Console Footprint 14 “ X 14” X 18”
Pump footprint 7” x 16” (sits on the LH side of the console)
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