Plasma Etch System Control Software

The operating interface for a Plasma Etch system is specifically designed for our systems. An easy to use, Windows® based computer program that oversees the operation of every plasma operation.

Every operator is trained in the use of the software by one of our trained engineers.

Out of limit conditions are alarmed and permanently recorded, product data, process parameter set points, monitored process parameters, alarm conditions and process sequence status are displayed on the GUI interface. All product and process data is automatically archived to the hard disk.

A major advantage of computer control is the ability to store and retrieve a large library of part numbers (recipes) and their appropriate processing parameters. Correct processing parameters are under computer control and are not dependent on individual operator judgment.

"Triple Sequence Program" features provide the capability for running three independent and different plasma processes sequentially