BT-1 Industrial Plasma Processing System

BT-1 Industrial Plasma Processing System

The BT-1 is a complete industrial grade plasma treatment solution capable of plasma cleaning, plasma etching, reactive ion etching (RIE), and more. Its large processing shelves and spacious chamber make this model perfect for the semiconductor, electronics, solar, PCB (printed circuit board), and industrial manufacturing markets as well as any other company in need of a cost-effective, high yield plasma processing solution.

To purchase a BT-1, please contact us at (775) 883-1336 or email us at

Standard Features

Electrode Configuration

Five Stacked Horizontal (20"Wx21"D + 3" Clearance) with Several Optional Configurations Available


600W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network

Gas Control

One 0-200cc Mass Flow Controller

Control System

Color PLC-Based Touch Screen Control Interface; Stores up to 20 Two-Step Recipes

Vacuum Gauge

1-2000 mT

Vacuum Pump

29CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

3 Micron Oil Filtration System

Chamber Material

6061-T6 Aluminum

Chamber Dimensions


Unit Dimensions


Unit Weight

Approx. 1200lbs

Vacuum Pump Weight


Made in the U.S.A.

Optional Features

Most systems can be customized with a wide range of options including:

Custom Sized Vacuum Chamber, Number/Size of Electrodes

To ensure your system is able to specifically meet your throughput requirements

Reactive Ion Electrodes

Enables reactive ion etching

Larger Power Supplies

Higher watt/frequency power supplies

PC-based Control System

For fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.

Electrostatic Shielding

Greatly increases process uniformity by eliminating excess etching at the outer bounds of the processed material

Temperature Control System

To maintain specific temperatures in the processing chamber for enhanced uniformity and application-specific needs

Dry and Oil-Driven Vacuum Pumps and Blower Boosters

A variety of vacuum pump options for more control over the process chamber pressure

Chiller System for Dry Vacuum Pump

Necessary for the operation of a dry vacuum pump

Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator

To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity

Vacuum Pump Oil Mist Eliminator

Captures oil from vacuum pump exhaust

Vacuum Pump Oil Filtration

Filters the vacuum pump oil down to a 3 micron level which increases the longevity of the oil and the vacuum pump

Automatic Vacuum Control

Provides automation of the process chamber pressure

Additional Digital Mass Flow Controllers

Provides digital automation and monitoring of process gases

Gas Steering Matrix

Designed to allow for up to 5 process gas inputs; 3 are selectable at any time by software driven controls

Low Gas-Source Alarm

Notification for when your process gas container needs replenished

Light Tower

For easy visualization of the steps of the plasma processing sequence

Fume Scrubber

To eliminate hazardous fumes/contaminants from the chamber/vacuum pump exhaust

Facility Requirements


120/208 VAC, 50/60 Hz, 3 Phase, 5 Wire, 30 Amps

Compressed Air Service

80-100PSI, 0.5CFM

Regulated Process Gases