PE-2000R Industrial Reel-to-Reel Plasma Processing System
The PE-2000R roll to roll plasma system is specially fitted with a continuous feed drive and take-up system to accommodate continuous flexible substrates and roll/reel mounted materials. Our reel-to-reel plasma system can accept web widths of 2” to 24” with spindle diameters of 10”.
Tension control is accomplished by a pivoting arm 3 inches in diameter in contact with the web in the process chamber coupled to a counterweight system outside the chamber isolated by a magnetic fluid feedthrough. It is actively controlled by the subsystem transport control.
Virtually any tension can be set by changing the external counter weights outside the chamber. Edge tracking and control is optically detected and is automatically controlled by a closed-loop servo motor mechanism bellows, isolated from the process. The actuator is outside the chamber.
To purchase a PE-2000R, please contact us at (775) 883-1336 or email us at firstname.lastname@example.org.
Standard FeaturesElectrode Configuration
Vertical, Planar 4 Level, 24” W x 36”L, 72” total process area will allow 1 meter per minuteGenerator
2500W 13.56MHz Continuously Variable Power Supply with Automatic Matching NetworkGas Control
Three 0-2000cc Mass Flow Controllers with Low Gas Source Alarm and Multiple Gas SelectionControl System
Color PLC-Based Touch Screen Control InterfaceVacuum Pump
2-Stage Dry Pump (Oxygen Service – Krytox Charged)Vacuum Gauge
1-2000 mTChamber Material
6061-T6 AluminumUnit Dimensions
Air Dryer for Purge Gas Generation
Automatic Nitrogen Pump Purge System
Controlled Rate Nitrogen Chamber Purge System
Signal Light Tower
Temperature Control SystemMade in the U.S.A.
Most systems can be customized with a wide range of options including:Custom Sized Vacuum Chamber, Number/Size of Electrodes
To ensure your system is able to specifically meet your throughput requirementsLarger MHz Power Supplies with Automatic Matching Network
Higher watt/frequency power suppliesPC-based Control System
For fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.Temperature Control System
To maintain specific temperatures in the processing chamber for enhanced uniformity and application-specific needsDry and Oil-Driven Vacuum Pumps and Blower Boosters
A variety of vacuum pump options for more control over the process chamber pressureChiller System for Dry Vacuum Pump
Necessary for the operation of a dry vacuum pumpChamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator
To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevityVacuum Pump Oil Mist Eliminator
Captures oil from vacuum pump exhaustVacuum Pump Oil Filtration
Filters the vacuum pump oil down to a 3 micron level which increases the longevity of the oil and the vacuum pumpAutomatic Vacuum Control
Provides automation of the process chamber pressureAdditional Digital Mass Flow Controllers
Provides digital automation and monitoring of process gasesSoftware Configurable Gas Steering Matrix
Designed to allow for up to 5 process gas inputs; 3 are selectable at any time by software driven controlsLow Gas-Source Alarm
Notification for when your process gas container needs replenishedLight Tower
For easy visualization of the steps of the plasma processing sequenceFume Scrubber
To eliminate hazardous fumes/contaminants from the chamber/vacuum pump exhaust
120/208 VAC, 50/60 Hz, 3 Phase, 5 Wire 100 AmpsCompressed Air Service
80-100PSI, 0.5CFMRegulated Process Gases
25-30PSIClosed Loop Chilled Water Source