PE-75 Venus Plasma Asher

The fully automated PE-75 Venus has all the features of the standard PE-75 but includes advanced software and features for greater control over the plasma process. All Venus systems include computerized gas valves for highly accurate and repeatable gas flow rate control.

A laptop loaded with Plasma Etch, Inc. software is included for fully automatic system operation, multiple recipe storage, data logging/trending, events/alarms, and multi-step sequencing.

Additional features include mass flow controllers, dual sequence programming, as well as process data acquisition and archiving.


To purchase a PE-75 Venus, please contact us at (775) 883-1336 or email us at sales@plasmaetch.com.


Standard Features

Electrode Configuration

One Horizontal (9"Wx10"D + 5.5" Clearance)

Generator

400W 50KHz Continuously Variable Power Supply

Gas Control

Two 0-25cc/min Rotometers with Precision Needle Valves

Control System

A laptop loaded with Plasma Etch, Inc. software is included for fully automatic system operation, process sequencing, multiple recipe storage, and other advanced features

Vacuum Gauge

1-2000 mT

Vacuum Pump

5CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

Chamber Material

6061-T6 Aluminum

Chamber Dimensions

10.75” Deep x 10” Round

Unit Dimensions

18"x19"x24"

Unit Weight

90lbs

Vacuum Pump Weight

35lbs

Made in the U.S.A.

Note: High frequency units may have larger external dimensions, so check with your sales rep if your space is limited.

Optional Features

All compact benchtop systems can be thoroughly customized with a wide range of features including:

MHz Power Supplies with Automatic Matching Network

Higher watt/frequency power supplies

Dry Vacuum Pump

For more control over the process chamber pressure

Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator

To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity

Additional Gas Inputs/Rotometers

Allows for more complex process gas combinations

Additional Digital Mass Flow Controllers

Provides digital automation and monitoring of process gases

Light Tower

For easy visualization of the steps of the plasma processing sequence

Facility Requirements

Electrical

120VAC / 60Hz @ 15A or 220VAC / 50Hz @ 14A