PE-5000 Large Scale Plasma Treatment System
The PE-5000 is a large plasma treatment system ideal for cleaning and activating large or bulky parts. The removable, adjustable height shelves hold up to 100lbs each.
All PE-5000 systems include Plasma Etch's easy to use PC control system. A graphical user interface displays the status of the system at all times while allowing unlimited recipe storage, historical logging with a calendar feature, and more.
Available with front and back doors to allow inline treatment, this system was designed to plasma clean and activate nearly any size product.
The PE-5000 is an excellent choice for clean room settings.
To purchase a PE-5000, please contact us at (775) 883-1336 or email us at email@example.com.
Standard FeaturesElectrode Configuration
Vertical electrode designGenerator
Fully adjustable and removable shelves. 100 lbs per shelf load ratingGenerator
5000 Watt RF Generator - 40 KHzGas Control
Two 0-5000cc Mass Flow Controllers with Low Gas Source AlarmControl System
PC-based Control System for fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms with calendarVacuum Pump
2600 CFM Pump and BlowerVacuum Gauge
1-2000 mTChamber Material
6061-T6 AluminumUnit Dimensions
90" Tall x 89" Wide x 63" DeepMade in the U.S.A.
Most systems can be customized with a wide range of options including:Custom Sized Vacuum Chamber, Number/Size of Electrodes
To ensure your system is able to specifically meet your throughput requirementsTemperature Control System
To maintain specific temperatures in the processing chamber for enhanced uniformity and application-specific needsDry and Oil-Driven Vacuum Pumps and Blower Boosters
A variety of vacuum pump options for more control over the process chamber pressureChiller System for Dry Vacuum Pump
Necessary for the operation of a dry vacuum pumpChamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator
To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevityVacuum Pump Oil Mist Eliminator
Captures oil from vacuum pump exhaustVacuum Pump Oil Filtration
Filters the vacuum pump oil down to a 3 micron level which increases the longevity of the oil and the vacuum pumpAutomatic Vacuum Control
Provides automation of the process chamber pressureAdditional Digital Mass Flow Controllers
Provides digital automation and monitoring of process gasesSoftware Configurable Gas Steering Matrix
Designed to allow for up to 5 process gas inputs; 3 are selectable at any time by software driven controlsLow Gas-Source Alarm
Notification for when your process gas container needs replenishedLight Tower
For easy visualization of the steps of the plasma processing sequenceFume Scrubber
To eliminate hazardous fumes/contaminants from the chamber/vacuum pump exhaust
120/208 VAC, 50/60 Hz @ 50-100Amps, 3 Phase, 5 WireCompressed Air Service
80-100PSI, 1 CFMRegulated Process Gases
15-30PSIClosed Loop Chilled Water Source
Cooling Water Source for RF Generator @ 2GPM