BT-1 Industrial Plasma Processing System
The BT-1 is a complete industrial grade plasma treatment solution capable of plasma cleaning, plasma etching, reactive ion etching (RIE), and more. Its large processing shelves and spacious chamber make this model perfect for the semiconductor, electronics, solar, PCB (printed circuit board), and industrial manufacturing markets as well as any other company in need of a cost-effective, high yield plasma processing solution.
To purchase a BT-1, please contact us at (775) 883-1336 or email us at sales@plasmaetch.com.
Standard Features
Electrode ConfigurationFive Stacked Horizontal (20"Wx21"D + 3" Clearance) with Several Optional Configurations Available
Generator600W 13.56MHz Continuously Variable Power Supply with Automatic Matching Network
Gas ControlOne 0-200cc Mass Flow Controller
Control SystemColor PLC-Based Touch Screen Control Interface; Stores up to 20 Two-Step Recipes
Vacuum Gauge1-2000 mT
Vacuum Pump29CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)
3 Micron Oil Filtration System
Chamber Material6061-T6 Aluminum
Chamber Dimensions25”x25”x22”
Unit Dimensions70"x36”x32”
Unit WeightApprox. 1200lbs
Vacuum Pump Weight150lbs
Made in the U.S.A.Optional Features
Most systems can be customized with a wide range of options including:
Custom Sized Vacuum Chamber, Number/Size of ElectrodesTo ensure your system is able to specifically meet your throughput requirements
Reactive Ion ElectrodesEnables reactive ion etching
Larger Power SuppliesHigher watt/frequency power supplies
PC-based Control SystemFor fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.
Electrostatic ShieldingGreatly increases process uniformity by eliminating excess etching at the outer bounds of the processed material
Temperature Control SystemTo maintain specific temperatures in the processing chamber for enhanced uniformity and application-specific needs
Dry and Oil-Driven Vacuum Pumps and Blower BoostersA variety of vacuum pump options for more control over the process chamber pressure
Chiller System for Dry Vacuum PumpNecessary for the operation of a dry vacuum pump
Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas GeneratorTo ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity
Vacuum Pump Oil Mist EliminatorCaptures oil from vacuum pump exhaust
Vacuum Pump Oil FiltrationFilters the vacuum pump oil down to a 3 micron level which increases the longevity of the oil and the vacuum pump
Automatic Vacuum ControlProvides automation of the process chamber pressure
Additional Digital Mass Flow ControllersProvides digital automation and monitoring of process gases
Gas Steering MatrixDesigned to allow for up to 5 process gas inputs; 3 are selectable at any time by software driven controls
Low Gas-Source AlarmNotification for when your process gas container needs replenished
Light TowerFor easy visualization of the steps of the plasma processing sequence
Fume ScrubberTo eliminate hazardous fumes/contaminants from the chamber/vacuum pump exhaust
Facility Requirements
Electrical120/208 VAC, 50/60 Hz, 3 Phase, 5 Wire, 30 Amps
Compressed Air Service80-100PSI, 0.5CFM
Regulated Process Gases15PSI
