PE-50 XL Venus Benchtop Vacuum Plasma System
The fully automated PE-50 XL Venus has all the features of the standard PE-50 XL but includes advanced software and features for greater control over the plasma process. All Venus systems include computerized gas valves for highly accurate and repeatable gas flow rate control.
A laptop loaded with Plasma Etch, Inc. software is included for fully automatic system operation, multiple recipe storage, data logging/trending, events/alarms, and multi-step sequencing.
Additional features include mass flow controllers, dual sequence programming, as well as process data acquisition and archiving.
To purchase a PE-50XL Venus, please contact us at (775) 883-1336 or email us at sales@plasmaetch.com.
Standard Features
Electrode ConfigurationOne Horizontal (7"Wx8"D + 2.5" Clearance)
Generator400W 50KHz Continuously Variable Power Supply
Gas ControlTwo 0-25cc/min Rotometers with Precision Needle Valves
Control SystemA laptop loaded with Plasma Etch, Inc. software is included for fully automatic system operation, process sequencing, multiple recipe storage, and other advanced features
Vacuum Gauge1-2000 mT
Vacuum Pump5CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)
Chamber Material6061-T6 Aluminum
Chamber Dimensions7.5”Wx8.75”Dx3.5”H
Unit Dimensions14"x14.5"x18"
Unit Weight55lbs
Vacuum Pump Weight35lbs
Made in the U.S.A.Note: High frequency units may have larger external dimensions, so check with your sales rep if your space is limited.
Optional Features
All compact low pressure plasma systems can be thoroughly customized with a wide range of features including:
MHz Power Supplies with Automatic Matching Network.Higher watt/frequency power supplies
Dry Vacuum PumpFor more control over the process chamber pressure
Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas GeneratorTo ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity
Additional Gas Inputs/RotometersAllows for more complex process gas combinations
Additional Digital Mass Flow ControllersProvides digital automation and monitoring of process gases
Light TowerFor easy visualization of the steps of the plasma processing sequence
Facility Requirements
Electrical120VAC / 60Hz @ 15A or 220VAC / 50Hz @ 14A
