PE-50 XL Venus Benchtop Vacuum Plasma System
The fully automated PE-50 XL Venus has all the features of the standard PE-50 XL but includes advanced software and features for greater control over the plasma process. All Venus systems include computerized gas valves for highly accurate and repeatable gas flow rate control.
A laptop loaded with Plasma Etch, Inc. software is included for fully automatic system operation, multiple recipe storage, data logging/trending, events/alarms, and multi-step sequencing.
Additional features include mass flow controllers, dual sequence programming, as well as process data acquisition and archiving.
To purchase a PE-50XL Venus, please contact us at (775) 883-1336 or email us at email@example.com.
Standard FeaturesElectrode Configuration
One Horizontal (7"Wx8"D + 2.5" Clearance)Generator
400W 50KHz Continuously Variable Power SupplyGas Control
Two 0-25cc/min Rotometers with Precision Needle ValvesControl System
A laptop loaded with Plasma Etch, Inc. software is included for fully automatic system operation, process sequencing, multiple recipe storage, and other advanced featuresVacuum Gauge
1-2000 mTVacuum Pump
5CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)Chamber Material
6061-T6 AluminumChamber Dimensions
55lbsVacuum Pump Weight
35lbsMade in the U.S.A.
Note: High frequency units may have larger external dimensions, so check with your sales rep if your space is limited.
All compact low pressure plasma systems can be thoroughly customized with a wide range of features including:MHz Power Supplies with Automatic Matching Network.
Higher watt/frequency power suppliesDry Vacuum Pump
For more control over the process chamber pressureChamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator
To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevityAdditional Gas Inputs/Rotometers
Allows for more complex process gas combinationsAdditional Digital Mass Flow Controllers
Provides digital automation and monitoring of process gasesLight Tower
For easy visualization of the steps of the plasma processing sequence
120VAC / 60Hz @ 15A or 220VAC / 50Hz @ 14A